MEMS and NEMS : system, devices, and structures /

MEMS and NEMS : system, devices, and structures /

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Главный автор:	Lyshevski, Sergey Edward (Автор)
Формат:	‌
Язык:	English
Опубликовано:	Boca Raton CRC Press c2002.
Серии:	Nano- and microscience, engineering, technology, and medicine series.
Предметы:	Microelectromechanical systems.
Метки:	Добавить метку Нет меток, Требуется 1-ая метка записи!

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