MEMS and NEMS : system, devices, and structures /
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主要作者: | Lyshevski, Sergey Edward (Author) |
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格式: | 圖書 |
語言: | English |
出版: |
Boca Raton
CRC Press
c2002.
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叢編: | Nano- and microscience, engineering, technology, and medicine series.
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