MEMS and NEMS : system, devices, and structures /

MEMS and NEMS : system, devices, and structures /

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书目详细资料
主要作者:	Lyshevski, Sergey Edward (Author)
格式:	图书
语言:	English
出版:	Boca Raton CRC Press c2002.
丛编:	Nano- and microscience, engineering, technology, and medicine series.
主题:	Microelectromechanical systems.
标签:	添加标签没有标签, 成为第一个标记此记录!

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