MEMS and NEMS : system, devices, and structures /

MEMS and NEMS : system, devices, and structures /

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Détails bibliographiques
Auteur principal:	Lyshevski, Sergey Edward (Auteur)
Format:	Livre
Langue:	English
Publié:	Boca Raton CRC Press c2002.
Collection:	Nano- and microscience, engineering, technology, and medicine series.
Sujets:	Microelectromechanical systems.
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