Nano-and microelectromechanical systems : fundamentals of nano- and microengineering /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton
CRC Press
c2001.
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| Subjects: | |
| Online Access: | CRCnetBASE |
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| Item Description: | Also available via ENGnetBASE |
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| Physical Description: | 338 pages: illustrations; 24 cm. |
| ISBN: | 0849309166 |