Proceedings of the 10th International Autumn Meeting Gettering and defect engineering in semiconductor technology : GADEST 2003, Seehotel Zeuthen (suburb of Berlin), State of Brandenburg, Germany, September 21-26, 2003 /

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Bibliographic Details
Corporate Author: International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" Seehotel Zeuthen, Germany
Other Authors: Richter, H., 1940-, Kittler, M. (Martin)
Format: Conference Proceeding Book
Language:English
Published: Uetikon-Zurich Enfield, N.H. SciTech Publishing 2004
Series:Diffusion and defect data. Solid state phenomena ; v. 95/96
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