APA (7th ed.) Citation

International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" Seehotel Zeuthen, Germany, Richter, H., & Kittler, M. (2004). Proceedings of the 10th International Autumn Meeting Gettering and defect engineering in semiconductor technology: GADEST 2003, Seehotel Zeuthen (suburb of Berlin), State of Brandenburg, Germany, September 21-26, 2003. SciTech Publishing.

Chicago Style (17th ed.) Citation

International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" Seehotel Zeuthen, Germany, H. Richter, and M. Kittler. Proceedings of the 10th International Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology: GADEST 2003, Seehotel Zeuthen (suburb of Berlin), State of Brandenburg, Germany, September 21-26, 2003. Uetikon-Zurich Enfield, N.H: SciTech Publishing, 2004.

MLA (8th ed.) Citation

International Autumn Meeting "Gettering and Defect Engineering in Semiconductor Technology" Seehotel Zeuthen, Germany, et al. Proceedings of the 10th International Autumn Meeting Gettering and Defect Engineering in Semiconductor Technology: GADEST 2003, Seehotel Zeuthen (suburb of Berlin), State of Brandenburg, Germany, September 21-26, 2003. SciTech Publishing, 2004.