Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering /
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
©2005
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| Edition: | 2nd ed. |
| Series: | Nano- and microscience, engineering, technology, and medicine series
8 |
| Subjects: | |
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