Optimization of nitride deposition process using Taguchi method
This final year project is mainly focused on obtaining the most optimize parameters of PECVD Si3N4 deposition process by using DOE. The Taguchi method of DOE will be used in performing optimization of the deposition process. Raw data for the deposition process is provided by the deposition module fr...
Na minha lista:
| Autor principal: | |
|---|---|
| Formato: | Recurso Electrónico Software Base de Dados |
| Idioma: | English |
| Assuntos: | |
| Tags: |
Adicionar Tag
Sem tags, seja o primeiro a adicionar uma tag!
|
| Resumo: | This final year project is mainly focused on obtaining the most optimize parameters of PECVD Si3N4 deposition process by using DOE. The Taguchi method of DOE will be used in performing optimization of the deposition process. Raw data for the deposition process is provided by the deposition module from the resources of [a]-[e]. The Taguchi method is a simple and convenient way to explore the process window as it can minimize the number and cost of experiments. |
|---|---|
| Descrição do item: | Final Year Project |
| Descrição Física: | 1 CD-ROM 4 3/4 in. |