Optimization of nitride deposition process using Taguchi method

Optimization of nitride deposition process using Taguchi method

This final year project is mainly focused on obtaining the most optimize parameters of PECVD Si3N4 deposition process by using DOE. The Taguchi method of DOE will be used in performing optimization of the deposition process. Raw data for the deposition process is provided by the deposition module fr...

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Bibliografiske detaljer
Hovedforfatter:	Low, Zen Shiang (Author)
Format:	Electronisk Software Database
Sprog:	English
Fag:	Microelectronics.
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Lignende værker

Comparison of etching optimization process by taguchi method using minitab and design expert software
af: Azleen Abu Talib

Analysis of MEMS accelerometer sensor by using taguchi optimization method /
af: Nurul Izati Md. Johan
Udgivet: (2015)

Analysis of MEMS accelerometer sensor by using taguchi optimization method /
af: Nurul Izati Md. Johan
Udgivet: (2015)

Optimization on oxidation process using 2K factorial design method
af: Yeap, Li Chain

Analysis of deposited carbon based on electron beam induced deposition in scanning electron microscopy using secondary ion mass spectrometry
af: Nur Liana Kamal

Study of deposition time influence the conical structure during electron beam induced deposition (EBID)
af: Mohamad Shahrizal Md Ilias

The influence on the accelerating voltages on the growth of the square structure during electron beam induced deposition (EBID) method
af: Muhammad Afiq Abdul Aziz

Analysis of square shaped microstructure based electron bean induced deposition
af: Siti Fatimah Abdul Rahman

Electrical characterization of 0.15um CMOS transistor using tsuprem-4 and medici
af: Low, Pooi Lam

Optimization of glucose production from rice husk by using cellulase enzyme /
af: Nurhidayah Kamaruddin
Udgivet: (2013)

Simulation of ion implantation using Monte Carlo method for investigation on ion trajectories
af: Zainab Ramli

Study of the thickness of the silicon dioxide on wafer using dry and wet oxidation method
af: Mohamad Fadzli Ali

Intrusion detectionsystem
af: Low Kar Xin
Udgivet: (2015)

Polysilicon process development - the effect of pecvd process parameters on the film characteristics
af: Mujahidun Mashuri

Method of measurement of LTCC metallization thickness
af: Lee, Soo Khiang

Thin polycrystalline silicon process development
af: Muniyati Pakhuruddin

Comparison of Delays Between 4-Bits Ripple-Carry Adder And 4-Bits Carry Look-Ahead Adder Using Logical Effort Method/
af: Siti Nurhanani Che Yahya
Udgivet: (2011)

Semiconductor optical amplifier (SOA) for photonic signal processing/
af: Latty Shazana Ismail
Udgivet: (2011)

Area array packaging processes : for BGA, flip chip and CSP /
Udgivet: (2004)

Area array packaging processes : for BGA, Flip Chip, and CSP /

Fabrication of 50 ¡Łm transistor and AINiAu interconnection process
af: Shaffie Husin

Design and Analysis of a Digital Signal Processing for Biomedical Application System/
af: Ch'ng, Ei Peng
Udgivet: (2011)

Automated classroom reservation using SMS
af: Nurul Nadiah Binti Mohamed Hatta
Udgivet: (2015)

The effect of process parameters on metal step coverage for aluminum (AI) by evaporation technique
af: Noraishah Azman

Student attendance management system using RFID
af: Nurul A'qilah Bt. Hasmizi
Udgivet: (2015)

The Design of an Encryption Chip Using Vigenere Cipher/
af: Tan, Shih Peng
Udgivet: (2011)

Portable phone directory using altera devices/
af: Vincent, Tiong Kwong
Udgivet: (2011)

Portable phone directory using altera devices/
af: Mohammad Isa Ahmad Azan
Udgivet: (2011)

Simulation of 0.35 Um NMOS process based on UniMAP Cleanroom facilities
af: Izny Atikah Ahmad Fahmi

Study of the effect of different gases parameter in dry etching process on etch rate profile
af: Zaharah Mohamad

Smart arm robot using visual basic program
af: Wee, Joo Ann

Design and implementation of a music box using FPGA
af: Tan, Kian Yiak

Portable Food Menu Directory Using Altera Devices/
af: Chi, Choong Tian
Udgivet: (2011)

Design and implementation of a VGA display generator using FPGA
af: Haslinda Hassan

Design a current mirror using body driven technique
af: Siti Zawana Abdul Rani

RC car control using accelerometer sensor (RCC-A)
af: Alif Aizat Azraie Bin Ahmad Jaelan
Udgivet: (2015)

Ultrasonic range meter using PIC19F876
af: Muhammad Shukran Ghanim

Fan control and monitoring system using visual basic program /
af: Khairul Hisyam Hasan
Udgivet: (2008)

Development door locking system via bluetooh using 8051
af: Nesamalar Rukkumaran
Udgivet: (2015)

Design and simulation of CMOS operational amplifier using mentor graphics tool
af: Ramalu, Jegatheesan Sri