Comparison of etching optimization process by taguchi method using minitab and design expert software
A design of experiment for high throughput pad etch by reactive ion etch is reported. Design of Experiment (DOE) is a technique for optimizing process which has controllable inputs and measurable outputs. The L9 orthogonal array DOE using Taguchi method is applied for Passivation Module (Pad Etch)...
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| Format: | Electronic Software Database |
| Language: | English |
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