Reactive ion etching (RIE) etched wet-silica-on-silicon analysis for fluidwettability

The objective of this project is to analyze fluid wettability with water droplets testing on etched silicon thus to observe the characterization on wafer surface profile of RIE etched wet-silica-on-silicon using Atomic Force Microscope (AFM).

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Bibliografiske detaljer
Hovedforfatter: Noor Aini Hamimah Abd. Rahim (Author)
Format: Electronisk Software Database
Sprog:English
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