Microfluidic poly-si electrodes capacitor (fabricate & testing)

The objectives of this project is to fabricate a micro channel on silicon wafer and to measure the capacitance and electrical properties as a whole.

Saved in:
Bibliografiske detaljer
Hovedforfatter: Esmal Fhadly Abd Malek (Author)
Format: Electronisk Software Database
Sprog:English
Fag:
Tags: Tilføj Tag
Ingen Tags, Vær først til at tagge denne postø!
Beskrivelse
Summary:The objectives of this project is to fabricate a micro channel on silicon wafer and to measure the capacitance and electrical properties as a whole.
Emne beskrivelse:Final Year project
Fysisk beskrivelse:1 CD-ROM 4 3/4 in.