Study the effect of bird's beak on fully recessed locos and poly buffered locos using 2 different pad oxide
The aim of this project is to produces the fully-recessed LOCOS and poly-buffered LOCOS. The project comprises several steps of process to produce the Poly-buffered locos and fully recessed LOCOS. In case of this project, the poly-buffered locos is actually one of the isolation technique that replac...
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Formáid: | Leictreonach Bogearraí Bunachar sonraí |
Teanga: | English |
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