MEMS design and fabrication (EMT 432/4) /

MEMS design and fabrication (EMT 432/4) /

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Bibliographic Details
Main Author: Hasnizah Aris (Author)
Other Authors: Zaliman Sauli, Nur Hamidah Abdul Halim
Format: Book
Language:English
Subjects:
Microelectromechanical systems > Design and construction.
Microfabrication.
Microelectromechanical systems
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Description
Physical Description:114 pages illustrations 30 cm.
ISBN:X100000000093(pbk)

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