MEMS design and fabrication (EMT 432/4) /

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Bibliographic Details
Main Author:	Hasnizah Aris (Author)
Other Authors:	Zaliman Sauli, Nur Hamidah Abdul Halim
Format:	Book
Language:	English
Subjects:	Microelectromechanical systems > Design and construction. Microfabrication. Microelectromechanical systems
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