Study of the thickness of the silicon dioxide on wafer using dry and wet oxidation method

Study of the thickness of the silicon dioxide on wafer using dry and wet oxidation method

This final year project focused on four goals: to study the dry and wet oxidation thickness, to grow a thin layer of silicon dioxide (SiO2) on Si wafer, to determine the parameter required for thickness needed, and to compare with the simulation and theoretical thickness to achieve the most accurate...

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Bibliografiske detaljer
Hovedforfatter:	Mohamad Fadzli Ali (Author)
Format:	Electronisk Software Database
Sprog:	English
Fag:	Microelectronics.
Tags:	Tilføj Tag Ingen Tags, Vær først til at tagge denne postø!

Lignende værker

Reactive ion etching (RIE) etched wet-silica-on-silicon analysis for fluidwettability
af: Noor Aini Hamimah Abd. Rahim

Method of measurement of LTCC metallization thickness
af: Lee, Soo Khiang

Study of aspect ratio performance on silicon oxide etching using profiler meter, AFM and SEM
af: Nur Syuhada Md. Desa

Theoretical study, simulation & fabrication on dry oxidation in terms of Si02 layer thinckness, resistivity & surface roughness
af: Mohd Adam Alias

Study of the temperature effect on thickness and surface roughness of Si02
af: Mohd Azdi Asis

Optimization on oxidation process using 2K factorial design method
af: Yeap, Li Chain

Study of the effect of different gases parameter in dry etching process on etch rate profile
af: Zaharah Mohamad

Study on diffusivity of gallium dopant in silicon using spin on dopant (SOD) technique
af: Mohd Rosydi Zakaria

Thin polycrystalline silicon process development
af: Muniyati Pakhuruddin

Design and simulation of silicon-based magnetic sensor/
af: Nor Azlan Mohamed
Udgivet: (2011)

Study the effect of bird's beak on fully recessed locos and poly buffered locos using 2 different pad oxide
af: Hafizal Hafiz Sarjoni

Effect of different dielectric materials for ultrathin oxide
af: Zarimawaty Zailan

Investigation and modelling of boron diffusion reduction in silicon by fluorine implantation using numerical simulation
af: Chuah, Soo Kiet

The study on the effect of varing dopant concentration and diffusion time in the design of silicon avalanche diode with minimum VBR of 120+-20%
af: Yip, Siew Ling

Gate oxide interrity (GOI) characterization for deep submicron CMOS device
af: Norain Bt Mohd Saad

A study on surface roughness and morphology of Gallium Oxide Doped Ba0.5 Sr0.5 Ti03 thin film
af: Fadrul Hisham Mohd Fauzi

Optimization of nitride deposition process using Taguchi method
af: Low, Zen Shiang

Simulation of ion implantation using Monte Carlo method for investigation on ion trajectories
af: Zainab Ramli

Silicon wafer bonding technology : for VLSI and MEMS applications /
Udgivet: (2002)

Comparison of etching optimization process by taguchi method using minitab and design expert software
af: Azleen Abu Talib

Study of semi-recessed LOCOS for quasi-nanoscale CMOS devise isolation
af: Mohamad Idzham Abd Sani

Study and design the current mirror using bulk-driven technique for low voltage analog
af: Mohd Faidzul Bukhari Mohd Kanafiah

Study of deposition time influence the conical structure during electron beam induced deposition (EBID)
af: Mohamad Shahrizal Md Ilias

Study and design infrared beacon for the blind
af: Mohd Fadzlie Rasit

Study and improvement of UniMAP shower room
af: Lau, Iyu Pin

Comparison of Delays Between 4-Bits Ripple-Carry Adder And 4-Bits Carry Look-Ahead Adder Using Logical Effort Method/
af: Siti Nurhanani Che Yahya
Udgivet: (2011)

Study the basic infrared tx-rx circuit design for robot
af: Nik Ahmad Faiz Abdul Jamel

The study of the effect of MOS transistor scaling on the critical device parameters
af: Zazurina Abd Rahman

Study the effect of environmental noise on infrared Tx-Rx circuit signals
af: Mohd Zaihan Ibrahim

Automated classroom reservation using SMS
af: Nurul Nadiah Binti Mohamed Hatta
Udgivet: (2015)

Study in design of 32 x 4 bit static random access memory (SRAM)
af: Nor Bashariah Muhamad Bakhtiar

A Study of Proper Integrated Circuit (IC) Layout Techniques for a Parallel Adder/
af: Kau, Zee Shuang
Udgivet: (2011)

Student attendance management system using RFID
af: Nurul A'qilah Bt. Hasmizi
Udgivet: (2015)

The Design of an Encryption Chip Using Vigenere Cipher/
af: Tan, Shih Peng
Udgivet: (2011)

Portable phone directory using altera devices/
af: Vincent, Tiong Kwong
Udgivet: (2011)

Portable phone directory using altera devices/
af: Mohammad Isa Ahmad Azan
Udgivet: (2011)

The influence on the accelerating voltages on the growth of the square structure during electron beam induced deposition (EBID) method
af: Muhammad Afiq Abdul Aziz

A green house study of a capacitive soil moisture sensor for loamy clay soil
af: Nur Umirah Binti Johari
Udgivet: (2015)

Study of acceleratin voltage influence the conical structure during electron beam induced depasition (EBID)
af: Muhammad Afif Abdul Rahman

Smart arm robot using visual basic program
af: Wee, Joo Ann