Study of deposition time influence the conical structure during electron beam induced deposition (EBID)

Study of deposition time influence the conical structure during electron beam induced deposition (EBID)

This final year project is about studying parameter (deposition time) influence during electron beam induced deposition (EBID) in scanning electron microscopy (SEM). EBID is a versatile micro and nanofabrication technique based on electron-induced dissociation of carrying gas molecules adsorbed on a...

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書誌詳細
第一著者:	Mohamad Shahrizal Md Ilias (著者)
フォーマット:	電子媒体ソフトウェアデータベース
言語:	English
主題:	Microelectronics.
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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