Analysis of square shaped microstructure based electron bean induced deposition

Analysis of square shaped microstructure based electron bean induced deposition

The scope of this final year project is to analyze the smoothness of the surface and the growth rate of the structure influenced by the deposition times during EBID process. The deposited area will be analyzed using AFM to investigate which time is suitable as a parameter during the EBID process to...

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Dades bibliogràfiques
Autor principal:	Siti Fatimah Abdul Rahman (Autor)
Format:	Electrònic Software Base de dades
Idioma:	English
Matèries:	Microelectronics.
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