Analysis of square shaped microstructure based electron bean induced deposition

Analysis of square shaped microstructure based electron bean induced deposition

The scope of this final year project is to analyze the smoothness of the surface and the growth rate of the structure influenced by the deposition times during EBID process. The deposited area will be analyzed using AFM to investigate which time is suitable as a parameter during the EBID process to...

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書誌詳細
第一著者:	Siti Fatimah Abdul Rahman (著者)
フォーマット:	電子媒体ソフトウェアデータベース
言語:	English
主題:	Microelectronics.
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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