Vertical electrostatic comb-drive actuator for MEMs design /
This final year project is about vertical electrostatic comb-drive actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were in consideration for the optical applications. The comb-finger structure is able to produce actuati...
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| 第一著者: | |
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| フォーマット: | ソフトウェア データベース |
| 言語: | English |
| 主題: | |
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| 要約: | This final year project is about vertical electrostatic comb-drive actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were in consideration for the optical applications. The comb-finger structure is able to produce actuation force for a certain amount of displacement for the use of deflection. The comb-finger structure moves in a perpendicular direction to the substrate as a function of applied voltages. Actuation force changes for different physical parameters of the comb finger structure. |
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| 記述事項: | Final Year Project |
| 物理的記述: | 1 CD-ROM 4 3/4 in. |