Vertical electrostatic comb-drive actuator for MEMs design /

Vertical electrostatic comb-drive actuator for MEMs design /

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This final year project is about vertical electrostatic comb-drive actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were in consideration for the optical applications. The comb-finger structure is able to produce actuati...

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書誌詳細
第一著者:	Wan Mokhdzani Wan Nor Haimi (著者)
フォーマット:	ソフトウェアデータベース
言語:	English
主題:	Microelectronics.
タグ:	タグ追加タグなし, このレコードへの初めてのタグを付けませんか!

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