Vertical electrostatic comb-drive actuator for MEMs design /

Vertical electrostatic comb-drive actuator for MEMs design /

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This final year project is about vertical electrostatic comb-drive actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were in consideration for the optical applications. The comb-finger structure is able to produce actuati...

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Библиографические подробности
Главный автор:	Wan Mokhdzani Wan Nor Haimi (Автор)
Формат:	Программное обеспечение База данных
Язык:	English
Предметы:	Microelectronics.
Метки:	Добавить метку Нет меток, Требуется 1-ая метка записи!

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