Vertical electrostatic comb-drive actuator for MEMs design /
This final year project is about vertical electrostatic comb-drive actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were in consideration for the optical applications. The comb-finger structure is able to produce actuati...
Shranjeno v:
| Glavni avtor: | |
|---|---|
| Format: | Software Database |
| Jezik: | English |
| Teme: | |
| Oznake: |
Označite
Brez oznak, prvi označite!
|