Vertical electrostatic comb-drive actuator for MEMs design /
This final year project is about vertical electrostatic comb-drive actuator. A comb-finger structure is disclosed for use in optical switching applications. Large displacements of movable fingers were in consideration for the optical applications. The comb-finger structure is able to produce actuati...
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| 第一著者: | |
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| フォーマット: | ソフトウェア データベース |
| 言語: | English |
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