Semiconductor industrial hygiene handbook : monitoring, ventilation, equipment, and ergonomics /
This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal...
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| Main Authors: | , , |
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| Format: | Software eBook |
| Language: | English |
| Published: |
Park Ridge, N.J., U.S.A.
Noyes Publications
c1995.
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| Subjects: | |
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