Fabrication and Characterization of Poly-Silicon Dioxide Nanogap Based on Capacitive Sensor by using Size Expansion Technique /
The aim of this research is to design, fabricate and characterize an array of planar nanogap capacitive sensor based on Poly-SiO2 structure by using size expansion technique.
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| Main Author: | |
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| Format: | Thesis Software eBook |
| Language: | English |
| Published: |
Perlis, Malaysia
School of Nanoelectronic Engineering
2012.
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| Subjects: | |
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| Summary: | The aim of this research is to design, fabricate and characterize an array of planar nanogap capacitive sensor based on Poly-SiO2 structure by using size expansion technique. |
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| Physical Description: | 1 CD-ROM 12 cm |
| Bibliography: | Includes bibliographical references (pages 80-83). |