Design and fabrication of N-ISFET using SI3N4/SIO2 structure for PH measurement /

The objective of this research is to design, fabricate and test Ionic Sensitive Field Effect Transistor (ISFET) for pH measurement.

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Bibliographic Details
Main Author: Nur Syuhada Md. Desa (Author)
Format: Thesis Software eBook
Language:English
Published: Perlis, Malaysia Institute of Nano Electronic Engineering 2013.
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