SiO2 in Si microdevices
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| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Berlin,NY
Springer
2002
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| Series: | Springer series in materials science,
v. 56 |
| Subjects: | |
| Tags: |
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Perpustakaan Laman Hikmah Kampus Induk, UTeM: Open Shelf
| Call Number: |
TK7874 75 M36 2002 |
|---|---|
| Copy Unknown | Available Place a Hold |