Mariam Md Ghazaly. (2012). Multilayer thin electrostatic actuator supported by only lubricating oil for fine stages.
Citação do estilo Chicago (17ª ed.)Mariam Md Ghazaly. Multilayer Thin Electrostatic Actuator Supported by Only Lubricating Oil for Fine Stages. 2012.
Citação MLA (8ª ed.)Mariam Md Ghazaly. Multilayer Thin Electrostatic Actuator Supported by Only Lubricating Oil for Fine Stages. 2012.
Nota: a formatação da citação pode não corresponder 100% ao definido pela respectiva norma.