Mariam Md Ghazaly. (2012). Multilayer thin electrostatic actuator supported by only lubricating oil for fine stages.
Chicago Style (17th ed.) CitationMariam Md Ghazaly. Multilayer Thin Electrostatic Actuator Supported by Only Lubricating Oil for Fine Stages. 2012.
MLA (8th ed.) CitationMariam Md Ghazaly. Multilayer Thin Electrostatic Actuator Supported by Only Lubricating Oil for Fine Stages. 2012.
Warning: These citations may not always be 100% accurate.