Multilayer thin electrostatic actuator supported by only lubricating oil for fine stages
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| Main Author: | |
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| Format: | Thesis Book |
| Published: |
2012
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Perpustakaan Laman Hikmah Kampus Induk, UTeM: Archives
| Call Number: |
TK2411 M37 2012 |
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| Copy Unknown | Available Place a Hold |