Multilayer thin electrostatic actuator supported by only lubricating oil for fine stages

Multilayer thin electrostatic actuator supported by only lubricating oil for fine stages

Taispeáin leaganacha eile (1)

Sábháilte in:

Sonraí bibleagrafaíochta
Príomhchruthaitheoir:	Mariam Md Ghazaly
Údar corparáideach:	Tokyo Institute of Technology. Department of Mechano-Micro Engineering
Formáid:	Tráchtas LEABHAR
Foilsithe / Cruthaithe:	2012
Ábhair:	Actuators
Clibeanna:	Cuir clib leis Níl clibeanna ann, Bí ar an gcéad duine le clib a chur leis an taifead seo!

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