MEMS : design and fabrication /
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boca Raton, FL
CRC Press/Taylor & Francis Group
2006.
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| Edition: | Second edition |
| Series: | Mechanical engineering series (Boca Raton, Fla.)
The MEMS handbook |
| Subjects: | |
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| Item Description: | One of three parts whose previous edition was a published as a single volume. |
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| Physical Description: | 1 volumes (various pagings): illustrations; 26 cm |
| ISBN: | 0849391385 0849321069 (set) |