MEMS : design and fabrication /
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| Formato: | Libro |
| Idioma: | English |
| Publicado: |
Boca Raton, FL
CRC Press/Taylor & Francis Group
2006.
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| Edición: | Second edition |
| Series: | Mechanical engineering series (Boca Raton, Fla.)
The MEMS handbook |
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| descrición da copia: | One of three parts whose previous edition was a published as a single volume. |
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| Descrición Física: | 1 volumes (various pagings): illustrations; 26 cm |
| ISBN: | 0849391385 0849321069 (set) |