MEMS : design and fabrication /

MEMS : design and fabrication /

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Bibliografiska uppgifter
Övriga upphovsmän:	Gad-el-Hak, Mohamed, 1945-
Materialtyp:	Bok
Språk:	English
Publicerad:	Boca Raton, FL CRC Press/Taylor & Francis Group 2006.
Upplaga:	Second edition
Serie:	Mechanical engineering series (Boca Raton, Fla.) The MEMS handbook
Ämnen:	Microelectromechanical systems > Design and construction. Microfabrication. Microelectromechanical systems
Taggar:	Lägg till en tagg Inga taggar, Lägg till första taggen!

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